Poly-Flow Engineering, LLC, a subsidiary of Ktech Corp.
With the recent acquisition of the Entegris cleaning tool line, Poly-Flow is your complete source for industrial high-tech cleaning. Their renowned systems offer the highest standards in workmanship, ease of operation and, most important, SAFETY.

Since 1974, Poly-Flow has been manufacturing the safest and most reliable wet processing tools for the most advanced semiconductor FABs in the world.

Poly-Flow offers cutting edge equipment in 300mm configurations for FOUPS and FOSBs, SMIF, Pods, quartzware, SiC, metal parts, ceramic parts and wafers.

A wide selection of equipment is available:

Quartzware Cleaners 
FOUP and FOSB Cleaners
Parts Cleaning
Wafer Processing
Chemical Management/Delivery Systems
FAB Accessories & Field Services

Rely on Poly-Flow for meeting the highest standards for your advanced device manufacturing requirements.


› More on Cleaning Systems on Polyflow website