CMP Slurry Delivery System
 FLOWMASTER
Poly-Flow’s FlowMaster TM, a most advanced Chemical Management/Delivery System will help you to reduce CMP defects.
The ultimate system features a feed module, a blend module and a distribution module. Outstanding critical components, ultra pure wet surfaces, integral process monitoring, redundancy and engineered software make the FlowMaster TM the most repeatable reliable and safe slurry distribution.
Some of the FlowMaster’s numerous benefits are :
- 25 proven installations (75 modules total)
- Documented performance down to 45 nanometer
- Designed for performance down to 32 nanometer
- Proven to reduced defects and scratches
- World class software
- Built-in redundancy
- Multiple chemical trains
- High uptime
- Ultra pure materials
- Proven critical components
- Built-in filtration
- Real time blending
- In-process monitors are integrated as required: - pH analyzers
- H2O2 analyzers
- conductivity analyzers
- particle analyzers
- specific gravity analyzers
- turbidity analyzers
The system meets or exceeds SEMI Safety Standards using FM-4920 fire safe materials. CE mark.
Poly-Flow Engineering, LLC is pleased to offer the world’s most
advanced Slurry Feed, blend and Distribution System designed and
tested to support the state-of-the-art CMP Slurry Delivery process.
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