FOUP & FOSB Cleaners

  MultiSpec 280 Box & Cassette Cleaner

- Batch cleaning of SMIF Pods, boxes and cassettes
- No metals in the process stream
- Vertical design reduces total floor space by 60%.
- Lightly heated HEPA filtered air directed throughout the   process chamber to speed drying
–› Download datasheet


   MultiSpec 277-I

- FOUP & FOSB Cleaner
- Manual load high through put
- No high speed rotation
- Ultra clean process with no metals in the process   stream
- Lightly heated HEPA filtered air directed throughout the   process chamber to speed drying
–› Download datasheet


   MultiSpec 277-II

- The MS-277-II Fully Automated/Factory Integrated   system is in the final engineering stages.
  The engineering package will be completed by May   2008 including many new features and benefits.
–› Download datasheet

  Process One FX30

  The Process One FX30 cleaning system is Poly-Flow’s   competitively priced system specially designed for 300   mm FOUP’s and FOSB’s.
  The FX30 provides superior cleaning and drying   performance in a compact unit using our patented   solution isolation technology (separating the inside   process water from the outside process water).
  The small footprint and all natural polymer wetted   surfaces make the FX30 the perfect tool by reducing   metallic contamination while giving you the ability to   add systems as your FAB ramps up!
–› Download datasheet


   Process One HTC 8030

  The Process One HTC 8030 clean system is Poly-Flow’s   very competitively priced system with flexible basket   configurations for cleaning wafer carriers, shippers,   storage boxes, SMIF Pods, Disk carriers, masks and   reticle carriers.
 –› Download datasheet