Resistance & Thickness XYZ Mapping Table
for Thin Film Solar Panels

Applications

This tester is required for measuring thin-film silicon solar panels during off-line production steps.
It combines automated measurements of sheet resistance of the first TCO-layer, of thickness of the a-Si-layer and of the resistance of the second TCO-layer.

Type of coatings for resistance measurements:
ZnO front/back; SnO front.
Type of coatings for thickness measurements: amorphous Silicon, mc-Si, SiN


XYZ Table Specifications

XYZ-table, standard size 1100 x 1300mm
(other table sizes upon request)
CE conformity
Measurement time < 3 sec
1000 user-programmable data points
1mm resolution between measured points
1mm geometrical resolution
Manual loading
Voltage 230V AC, current 10A, power: 2.5kWh
Security detectors to protect operators
Includes rack-mounted PC and control unit

• Substrate Sizes & Properties :
- Height up to 1100 mm x width up to 1300mm
- Thickness: 0.5mm up to 5mm
 - Roughness : 0 to 250nm

• Options:
   Automated loading
   Fixtures for smaller samples


Sheet Resistance Measurements
by Four Point Probe Method

Current source 10nA to 100mA (99.999mA)
Accuracy of current source better than 0.5% +/-50pA
Current set using numeric keypad
USB and RS-232 interface
Automatic compliance voltage limit
Measurement range: 1mΏ - 2MΏ per square


Thickness Measurements
by Optical Reflectivity Spectrometry

Thickness and optical thickness (n and p) are measured quickly and easily with the F20 spectrometer

Spectral analysis of reflectance from the top to the bottom of the thin film provides thickness, reflective index and extinction coefficients in seconds

• Spectrometer Specifications
  - Range: 50nm to 1,50 μm
  - Wavelength: 400nm - 1000nm
  - Resolution: 1nm at thickness 250nm