Mapping four point probes for wafers
up to 300mm
AIT Advanced Instrument Technology in Korea manufactures automatic Four Point Probe systems.
Technology developed with the Korean Institute of Standards.
 Model CMT-SR2000N
| Measures sheet resistance (ohm/sq), resisitvity (ohm.cm),
calculated thickness of wafers |
| PC remote control with exclusive software under Windows |
| Software for round and square samples. |
| Automatic range selection, LCD display. Data export under Excel |
| Contour map, 2 & 3-dimension maps, trend chart analyses |
Predefined measurement ASTM and SEMI modes,
Cartesian mode, manual mode and customized patterns |
| Comes with quality, easy removable, probe head with various specifications |
| Measurement platform for 200mm wafers |
Convenient table top stand-alone system. Easy to use |
–› Download CMT-SR2000N datasheet
Model CMT-SR5000
Same features as model CMT-SR2000N above
but with measurement platform for 300mm wafers.
High precision Z movement, smooth Z movement by air cylinder
Metal housing with cover on hinges.
–› Download CMT-SR5000 datasheet
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