Mercury Probes
MDC MERCURY PROBES are precision instruments designed for safe, repeatable, non-destructive electrical contact to dielectrics and semiconductors for C-V and I-V measurements.
| MERCURY PROBES eliminate time consuming metalization. Their accuracy and reproducibility make them ideal tools for production process monitoring as well as for R&D applications. |  |
• The 802B series include an electronic valve assembly, integrated vacuum pump, vacuum regulator and gauge.
Platforms for 150mm to 300mm wafers .
• The 802C series is the same as 802B series but includes a USB Interface for the latest CSM/Win Semiconductor Measurement and Analysis software for automatic control of contact formation and contact sensing.
• Models 862B and 864B Mapping Mercury Probe allow repeatable contacts over a wafer using manual X and Y positioning controls.
Platforms for 200mm and 300mm wafers.
Download mercury probe datasheet .pdf
MDC Mercury Probes make three contacts to the sample employing the unique MDC dot-ring configuration allowing both front-back and front-front modes on semi-insulating substrates. Using a front-side only or a front-back contact, MDC Mercury Probes measure permittivity, resistivity or doping profiles, oxide integrity, and oxide charges.
Guard ring configuration is available.
