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Four Point Probe Resistivity Measurements

We provide a wide range of manual tools, the appropriate one for each 4 point probe measurement activity, depending on characteristics of samples to be measured and the budget available. Manual probe stations and various equipment for four point probe measurement of resistivity, sheet resistance, failure analysis, engineering and bulk resistivity of materials used in the semiconductor industry, science institutions, and also in materials science such as wafers, ingots, films and conductive coatings. Calculating coating thickness on any sample shape and size. Use of four probe method. Compact, easy to use: simple and reliable systems. Ingot resistivity measurements, reflective coatings thickness calculation. Current sources 10 nA to 100 mA. Compliance voltage 0 to 50 V.

Benefits

  • Surface access measures resistance, thickness
  • Adapted stations support specific metrology needs
  • Operator efficiency and cost reduction
  • Enhanced user confidence
  • Faster and accurate results
  • Ease of measurements
  • Appropriate capacity for any study completion

Equipments:

Multi Height Four Point Probe

It consists of a hard anodised aluminium base 250mm wide, 290mm deep and 8mm thick. A column of stainless steel with a 19mm diameter and a height of 200mm secured to the base supports the probe head raising and lowering mechanism which incorporates the vertical slide, and operates lever shaft, and micro-switch. The vertical slide carries the probe-head, secured by a clamp screw.

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Microposition Probe Stand

The Multiheight Probe stand with micrometer controlled X-Y stage as a solution for measurements on sample sizes from several mm square up to 300mm. The X-Y microposition table can be easily added when measurement of small samples is desired. With only four screws to undo it is easily removed, so that large samples up to 300mm diameter or ingots up to 250mm high can be accommodated (thicker samples...

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Multiposition Wafer Probe

The probe is available in two sizes at the same cost. One size is for wafers up to 150mm diameter and the second for wafers up to 200mm diameter. If small sized wafers are to be measured the smaller version is more suitable for placement of the wafers on the measurement table. The Θ movement clicks in four positions at 90 degrees and the linear movement in up to 10 positions giving repeat...

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Universal Probe Station

Highly repeatable needle contact conditions. Custom adjustable needle loadings which directly indicate the set load. Micrometer controlled slice displacement. Four-point measurement of wafer resistivity and measurements of three-point spreading resistance. Hinged steel cover to exclude effects of light and eliminate electrical interference.

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Automatic Four Point Probe Arm option motorized Z motion arm

The Multiheight Probe station with an automatic Z motion (AFPP) for use in making four point probe measurements. The AFPP can be used for measuring a wide variety of samples from small sized thin layers and 300mm wafers up to ingots 250mm high (thicker samples can be accommodated on request).

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Probe Heads:

Compact Probe Head

For use on Veeco FPP50000 and FPP100 equipment. It is also suitable for use on GRQ equipment or to replace square bodied probe heads manufactured by Alessi.

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Cylindrical Four Point Probe Head

Jandel Engineering Limited manufactures the cylindrical four point probe head to be compatible with the Jandel Multiposition Wafer Probe, the Microposition Probe, the Multiheight Probe, The Multiheight/Microposition Probe, as well as some OEM mapping systems.

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Hand Applied Four Point Probe

A solution for making measurements where portability is a key factor. The system can be used for measuring a wide variety of samples from thin layers and wafers up to large ingots. The probe head can have loads of up to 200g per needle and the Hand Applied Probe has a large downward force of around...

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Probes for Prometrix KLA/Tencor

Manifactured with 6-way connector probe head to be compatible with systems manufactured by KLA/ Tencor (formerly Prometrix).

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Probes for Prometrix CDE

Manufactured with 6-way connector probe head to be compatible with systems manufactured by CDE, Creative Design Engineering

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Miniature Catridge Probe Head with Positioning Key

Manufactured with positioning key for use on older Napson and Kokusai equipment.

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Miniature Catridge Probe with 6-32/M3 Mounting Holes

For use on AIT equipment. The 6-32 or M3 mounting holes also make it suitable for use in customers’ own stands.

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Catridge with lead Probe Head

For use on customer ’s own equipment, some Veeco equipment, or where an A&M Fell style probe has previously been used.

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Catridge Probe With 4-Pin Connector Mounting

For use on Napson equipment or older Keithley-Omega equipment.

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Low Profile Probe for Hall Measurements

For use in making four point probe measurements associated with Hall measurements.

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Macor Probe

For use at high or low temperatures. The range the probe can be used in an oven is approximately 80K to 600K. If the sample only is heated the probe can be used for measurements up to 1000K although prolonged contact with the sample should be avoided.

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Hi-Vac Cylindrical Four Point Probe Head

A version of the cylindrical probe which can be used at high vacuum.

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Test Unit:

RM3000 Test Unit

Current Range : 10nA-100mA
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ResTest Meter

Current Range : 1uA-10mA
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HM21 Portable Four Point Probe Test Meter

Current Range : 100nA-10mA
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