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Refurbishment And Spares

Focus is done on manufacturers' needs to provide engineering solutions to innovation.

Benefits

  • Higher troughput
  • More advanced processes
  • Lower cost
  • Alternate source

Repair Optics and Mecanics:

Lenses Refurbishments

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ASML Exposure Chuck

amcoss offers refurbishment of the front- and backsides of Canon stepper exposure pin and ring chucks as well as ASML wafer tables. At first we will check whether spots, scratches and most of all cracks and chippings can be repaired at all.

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Wafer Feed Robot

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UV Reflector Refurbishment

During the UV-curing process solvents and other volatile substances in the protecting layers are vaporising due to the high temperatures in the lamp. These substances condense on the reflector surface and build up an unwanted layer. This layer then reduces UV reflectivity of the coating and brings down uniformity. As a result: refurbishment becomes necessary!

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Shutter Unit, Image, Shifter, Canon Wafer Robot

Our staff at amcoss employs great expertise in carrying out electronic or mechanical repairs for shutters and shutter-motors.

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Stage and Alignement Laser Refurbishment HP Laser 5517 Zygo Laser 77xx Off Axis Laser

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Parts and Refurbishments for Rapid Thermal Process:

Reflector Plate Refurbishment

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RTP Race Refurbishment

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Lamp House Refurbishment

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Temp Match Tool Calibration

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Gold Sleeve Refurbishment

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Optics and Spares for Inspection:

Robots

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KLA Beamsplitter Refurbishment

After some time of exposure light rays and laser beams do leave black, burned-in spots on the...

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Optical Isolator Refurbishment

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QTR-HALF WAVE CHGR Repair

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Wafer Arms for Hitachi CD SEM, KLA

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Optics and Spares for Inspection:

Reflector for Ultra Low K Process new & Refurbishment

The ULK reflectors within the AMAT or Novellus equipment are grouped around the UV lamp. They are...

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Gold parts, new and refurbishment ASM / AMAT

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Pyrometer Calibration

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