Thickness measurement of ultra-thin film and refractive index after…
Spectral Ellipsometry Systems ST-ER For Process Monitoring Thickness
Applications:
Thickness measurement of ultra-thin film and refractive index after deposition of film and etching: LCD, OLED, TSP, PDP, LED, SEMI, SolarCell
ST-ER Specifications
Existing Functions
n, k / Thickness
Roughness /Interfacial
Mixing / Crystallinity
Anisotropy / Uniformity
Energy Band Gap etc.
Extended (Possible Functions)
N2 Chamber combined
3D Interferometer combined
Vision Inspection combined
Benefits:
High Speed Measurement
High Stability
Unique Technologies Providing
The Most Sensitive, Accurate Measurement
Compact Design for User Convenience
