Fast Measurement & Easy Operation Non-contact & Non-destructive Superb Repeatability & Reproducibility Windows based user-friendly interface Print function of each view & data saving.
ST4000
Option
Reference sample
CCD Camera
Transmittance module
Auto Z axis movement (lens)
Features
Fast Measurement & Easy Operation
Non-contact & Non-destructive
Superb Repeatability & Reproducibility
Windows based user-friendly interface
Print function of each view & data saving
Application
All capability of ST2000 & more precision
measurement
Intended for wafer measurement & OLED
Specification & Features
Measurement range – 100Å ~ 35 ㎛ (Depends on film)
Measurement speed – 1~2 sec/site
Stage size – 200mm X 200mm(8”), 300mm X 300mm(12”)
Measuring sample size – ≤ 8”, 12”(option)
Spot size – 40 ㎛/20 ㎛, 4 ㎛(option)
Measurement principle – Reflectometer
Measurement method – Non-contact
Type – Manual
Dimension – 500 x 610 x 640 mm
Weight – 45Kg
Focus – Coaxial coarse and fine focus control
Illumination – 12v 100w Halogen lamp
