All capability of ST2000 & more precision measurement.
ST5030SL
Features
Fast Measurement & Easy Operation
Non-contact & Non-destructive
Superb Repeatability & Reproducibility
Windows based user-friendly interface
Print function of each view & data saving
2D / 3D Mapping & Contouring
Automatic stage control & Anti-vibration table
CCD Camera
Auto Focusing
Application
All capability of ST2000 & more precision
measurement
Intended for large size wafer measurement
Specification & Features
Measurement range – 100Å ~ 35 ㎛ (Depends on film)
Measurement speed – 1~2 sec/site
Stage size – 300mm X 300mm
Measuring sample size – 4~12”
Spot size – 40 ㎛/20 ㎛, 4 ㎛(option)
Measurement principle – Reflectometer
Measurement method – Non-contact
Type – Automatic
Dimension – 500 x 750 x 650 mm
Weight – 100Kg
Illumination – 12v 100w Halogen lamp
Option – Reference Samples, Anti-vibration Table
