Refurbishment And Spares

Focus is done on manufacturers’ needs to provide engineering solutions to innovation.

Benefits

  • Higher troughput
  • More advanced processes
  • Lower cost
  • Alternate source

Repair Optics and Mecanics:

Lenses Refurbishments

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ASML Exposure Chuck

amcoss offers refurbishment of the front- and backsides of Canon stepper exposure pin and ring chucks as well as ASML wafer tables.
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Wafer Feed Robot

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UV Reflector Refurbishment

During the UV-curing process solvents and other volatile substances in the protecting layers are vaporising due to the high temperatures in the lamp. More Info

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Shutter Unit, Image, Shifter, Canon Wafer Robot

Our staff at amcoss employs great expertise in carrying out electronic or mechanical repairs for shutters and shutter-motors.
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Stage and Alignement Laser Refurbishment HP Laser 5517 Zygo Laser 77xx Off Axis Laser

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Parts and Refurbishments for Rapid Thermal Process:

Reflector Plate Refurbishment

For a list, please click on the next link:
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RTP Race Refurbishment

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Lamp House Refurbishment

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Temp Match Tool Calibration

For a see a list, please click on the next link:
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Gold Sleeve Refurbishment

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Optics and Spares for Inspection

Robots

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KLA Beamsplitter Refurbishment

After some time of exposure light rays and laser beams do leave black, burned-in spots on the…
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Optical Isolator Refurbishment

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QTR-HALF WAVE CHGR Repair

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Wafer Arms for Hitachi CD SEM, KLA

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Optics and Spares for Inspection

Reflector for Ultra Low K Process new & Refurbishment

The ULK reflectors within the AMAT or Novellus equipment are grouped around the UV lamp. They are…
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Gold parts, new and refurbishment ASM / AMAT

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Pyrometer Calibration

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