Refurbishment and Spares
Benefits
- Higher troughput
- More advanced processes
- Lower cost
- Alternate source
Repair Optics and Mecanics:
ASML Exposure Chuck
amcoss offers refurbishment of the front- and backsides of Canon stepper exposure pin and ring chucks as well as ASML wafer tables.
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UV Reflector Refurbishment
During the UV-curing process solvents and other volatile substances in the protecting layers are vaporising due to the high temperatures in the lamp. More Info
Shutter Unit, Image, Shifter, Canon Wafer Robot
Our staff at amcoss employs great expertise in carrying out electronic or mechanical repairs for shutters and shutter-motors.
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Stage and Alignement Laser Refurbishment HP Laser 5517 Zygo Laser 77xx Off Axis Laser
Please contact us for more details.
Wafertec pump – F30, F32, F1 and S30 models
Refurbishment & repair of Wafertec F30, Wafertec F32, Wafertec F1, and Wafertec S30
Parts and Refurbishments for Rapid Thermal Process:
Optics and Spares for Inspection
KLA Beamsplitter Refurbishment
After some time of exposure light rays and laser beams do leave black, burned-in spots on the…
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Optics and Spares for Inspection
Reflector for Ultra Low K Process new & Refurbishment
The ULK reflectors within the AMAT or Novellus equipment are grouped around the UV lamp. They are…
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Gold parts, new and refurbishment ASM / AMAT
Please contact us for more details.