Cleaning and Wet-etching
- Complete wet process provider
- Customized configuration according to customer requirements
- In-house Demo test facility for customer applications
- Process Qualification
- Modular design for easy installation
- Optimized footprint
- Refurbishing Service, Spare parts obsolescence availability
- Global service, Hotline, spare parts supply
Spin Step / R&D Laboratory
Spinning system for coating and developing for substrates up to 300mm. Available as build in or table top unit.
Fully automated compact wet processing tool
User friendly thanks to innovative software solution Designed for up to 12″ wafers.