Cleaning and Wet-etching
Benefits
- Complete wet process provider
- Customized configuration according to customer requirements
- In-house Demo test facility for customer applications
- Process Qualification
- Modular design for easy installation
- Optimized footprint
- Refurbishing Service, Spare parts obsolescence availability
- Global service, Hotline, spare parts supply
Equipments:
![Wet Process Manual / R&D Laboratory](https://www.mdc-europe.com/wp-content/uploads/2017/12/WetProcessManual.png)
Wet Process Manual / R&D Laboratory
Limited automation – unlimited process capability.
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![Spin Step / R&D Laboratory](https://www.mdc-europe.com/wp-content/uploads/2017/12/SpinStep_R_AND_DLaboratory.png)
Spin Step / R&D Laboratory
Spinning system for coating and developing for substrates up to 300mm. Available as build in or table top unit.
![SpinStep Flex line / R&D Laboratory](https://www.mdc-europe.com/wp-content/uploads/2017/12/SpinMask-e1514499229212.png)
SpinStep Flex line / R&D Laboratory
The modular, versatile single wafer system for etching, cleaning, lift-off, coating and developing.
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![RinseStep Drying / R&/D Laboratory](https://www.mdc-europe.com/wp-content/uploads/2017/12/RinseStep_Drying.png)
RinseStep Drying / R&/D Laboratory
The modular, versatile single wafer system for etching, cleaning, lift-off, coating and developing.
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![Glove cleaner / R&D Laboratory](https://www.mdc-europe.com/wp-content/uploads/2017/12/GloveCleaner.png)
Glove cleaner / R&D Laboratory
System to clean and dry your gloves.
![SpinEtcher SPE 200](https://www.mdc-europe.com/wp-content/uploads/2017/12/SpinEtcher-e1514499374930.png)
SpinEtcher SPE 200
For FEOL and BEOL processes like roughness etching, stress relief, polishing and film removel.
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![Spin Mask](https://www.mdc-europe.com/wp-content/uploads/2017/12/SpinMask-1-e1514499426382.png)
![Semi Automated TwinStep](https://www.mdc-europe.com/wp-content/uploads/2017/12/TwinStep-e1514499471336.png)
Semi Automated TwinStep
Designed for up to 50 wafers 1Semi-automated wet bench system for wafer cleaning, etching, stripping or developing.
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![Automated MultiStep Wet Processing](https://www.mdc-europe.com/wp-content/uploads/2017/12/MultiStep_GigaStep.png)
Automated MultiStep Wet Processing
Fully automated compact and durable wet processing tool Excellent for flexibility and variable process requirements. Designed for up to 8″ wafers.
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![Fully automated compact wet processing tool](https://www.mdc-europe.com/wp-content/uploads/2017/12/MultiStep_GigaStep_automated.png)
Fully automated compact wet processing tool
User friendly thanks to innovative software solution Designed for up to 12″ wafers.
![NID Dry (Nitrogen-IPA-Dispense Dryer)](https://www.mdc-europe.com/wp-content/uploads/2017/12/NIDDry.png)
NID Dry (Nitrogen-IPA-Dispense Dryer)
Stressless Marangoni wafer handling (NO BREAKAGE), low metal contamination and IPA consumption.
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![CleanStep Carrier Box](https://www.mdc-europe.com/wp-content/uploads/2017/12/CleanStep_Carrier_Box.png)
CleanStep Carrier Box
Efficient carrier/FOUP cleaning and drying by combining multiple work steps in one single tool.
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![CleanStep Parts](https://www.mdc-europe.com/wp-content/uploads/2017/12/CleanStep_Parts2-e1514499523394.png)
CleanStep Parts
Etching and cleaning of PECVD and diffusion boats (Graphite boats, quartz part, SiC boats etc.).
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![SpinEtcher from SEMI|PARTS](https://www.mdc-europe.com/wp-content/uploads/2017/12/SpinEtcher_from_semi.png)
![Spin Lift-off](https://www.mdc-europe.com/wp-content/uploads/2017/12/SpinLift-off.png)
![CleanStep Tube](https://www.mdc-europe.com/wp-content/uploads/2017/12/CleanStep_Tube.png)
CleanStep Tube
Semi automated tube cleaner for horizontal or vertical quartz tube cleaning.
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![Chemical Supply Systems / Chemical Management Systems](https://www.mdc-europe.com/wp-content/uploads/2017/12/ChemicalManagementSystem-e1514499581502.png)
Chemical Supply Systems / Chemical Management Systems
Fully automated chemical management systems to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries. Available for the following applications:
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