Etching and cleaning of PECVD and diffusion boats (Graphite boats, quartz part, SiC boats etc.).
The CleanStep Parts is designed for etching and cleaning of PECVD and diffusion boats such as graphite boats, quartz part, and silicon carbide boats etc.
BENEFITS
> Safe operation by closed process chamber, load and unload only after complete rinse of process chamber
> Fail-safe door locking system
> Process chamber protected against overfilling
> Exhaust monitoring
> Conductivity probe for door interlock (Quartz boat cleaner only)
> Easy and safe operation by high quality user interface (Touch screen)
> Minimized cleaning costs per boat by low consumption of media, 2–3 times shorter compared to immersion process
> Reduced operation times
> Consumption of chemicals approx. 10 times lower compared to immersion process
> Very uniform cleaning, DI water consumption is approx. 2 times lower compared to immersion process
> High availability and low maintenance requirements by modular design and long life components
> Very small footprint
APPLICATIONS
The CleanStep Parts is designed for etching and cleaning of PECVD and diffusion boats such as graphite boats, quartz part, and silicon carbide boats etc.
Example for a standard design is cleaning of 2 graphite boats or 4 quartz boats. A strong argument for this spraying process instead of an immersion process is the extremely fast process times also the chemical consumption is a valuable reason to take the decisions for the spray process.
Options
> Waste tank lifting device
> Housing structure of the system »FM approved material«
> HF gas detection toxic detector
> Centrotherm graphite boat basket set for 19 to 21 slot »disassembled boat«
> Centrotherm graphite boat carrier set for 23 slot »disassembled boat«
> Quartz boat holder for quartz part cleaning
> Drip pan drain connection valve
> Resistivity measurement
> Oven for drying carriers manuel load
> Preparation tank for 30 liter HNO3 / HF/ DI-H2O
> Separate tool media supply for pre used HF
> NOx gas detection toxic detector
> ACI carrier holder for wafer back etching
> N2 purge
