Four Point Probe Resistivity Measurements

We provide a wide range of manual tools, the appropriate one for each 4 point probe measurement activity, depending on characteristics of samples to be measured and the budget available. Manual probe stations and various equipment for four point probe measurement of resistivity, sheet resistance, failure analysis, engineering and bulk resistivity of materials used in the semiconductor industry, science institutions, and also in materials science such as wafers, ingots, films and conductive coatings. Calculating coating thickness on any sample shape and size. Use of four probe method. Compact, easy to use: simple and reliable systems. Ingot resistivity measurements, reflective coatings thickness calculation. Current sources 10 nA to 100 mA. Compliance voltage 0 to 50 V.

Benefits

  • Surface access measures resistance, thickness
  • Adapted stations support specific metrology needs
  • Operator efficiency and cost reduction
  • Enhanced user confidence
  • Faster and accurate results
  • Ease of measurements
  • Appropriate capacity for any study completion

 Equipments:

Automatic Four Point Probe Arm option motorized Z motion arm

The Multiheight Probe station with an automatic Z motion (AFPP) for use in making four point probe measurements.

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Multi Height Four Point Probe

It consists of a hard anodised aluminium base 250mm wide, 290mm deep and 8mm thick. A column of stainless steel with a 19mm diameter…

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Microposition Probe Stand

The Multiheight Probe stand with micrometer controlled X-Y stage as a solution for measurements on sample sizes from several mm square up to 300mm.

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Multiposition Wafer Probe

The probe is available in two sizes at the same cost. One size is for wafers up to 150mm diameter and the second for wafers up to 200mm diameter. More Info

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Universal Probe Station

Highly repeatable needle contact conditions. Custom adjustable needle loadings which directly indicate the set load.

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Test Unit:

RM3000 Test Unit

Current Range : 10nA-100mA.

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ResTest Meter

Current Range : 1uA-10mA.

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HM21 Portable Four Point Probe Test Meter

Current Range : 100nA-10mA.

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Four Point Probe Heads

Different models (new, refurbished and repaired) to fit all known resistivity measurement systems (prometrix, CDE, KLA, Napson, Veeco) Customized probe spacing, load, tip material. Probe Spacing : 0.5 / 0.635 / 1.0 / 1.59 mm – Loads : 10 to 250 g.

Probe Heads:

Compact Probe Head

For use on Veeco FPP50000 and FPP100 equipment. It is also suitable for use on GRQ equipment or to replace square bodied probe heads manufactured by Alessi.

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Cylindrical Four Point Probe Head

Jandel Engineering Limited manufactures the cylindrical four point probe head to be compatible with the Jandel Multiposition Wafer Probe, the Microposition Probe, the Multiheight Probe,…

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Hand Applied Four Point Probe

A solution for making measurements where portability is a key factor. The system can be used for measuring a wide variety of samples from thin layers and wafers up to large ingots.

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Probes for Prometrix KLA/Tencor

Manufactured with 6-way connector probe head to be compatible with systems manufactured by KLA/ Tencor (formerly Prometrix).

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Probes for Prometrix CDE

Manufactured with 6-way connector probe head to be compatible with systems manufactured by CDE, Creative Design Engineering.

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Miniature Catridge Probe Head with Positioning Key

Manufactured with positioning key for use on older Napson and Kokusai equipment.

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Miniature Catridge Probe with 6-32/M3 Mounting Holes

For use on AIT equipment. The 6-32 or M3 mounting holes also make it suitable for use in customers’ own stands.

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Catridge with lead Probe Head

For use on customer ’s own equipment, some Veeco equipment, or where an A&M Fell style probe has previously been used.

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Catridge Probe With 4-Pin Connector Mounting

For use on Napson equipment or older Keithley-Omega equipment.

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Low Profile Probe for Hall Measurements

For use in making four point probe measurements associated with Hall measurements.

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Macor Probe

For use at high or low temperatures. The range the probe can be used in an oven is approximately 80K to 600K.

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Hi-Vac Cylindrical Four Point Probe Head

A version of the cylindrical probe which can be used at high vacuum.

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Automatic Mapping Four Point Probe Resistivity Measurements

Square & Round wafers mapping systems with different types of platform sizes. Measurement of resistivity, sheet resistance and calculate coating thickness. Completely integrated systems, direct indication of the calculed thickness, powerful graphical output of the results. Possible to measure over 5000 points on wafers overnight.

Benefits

  • Measurement efficiency , consistency
  • Adapted for Wafer and Solar application
  • Reproducibility
  • Cost reduction

Equipments:

CMT-SR2000N

The entry-level model of the AIT four point measuring systems family.

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CMT-SR2000PV

The CMT SR2000 is a completely automated, mapping four point measuring system. It offers precise and fiable mapping measurements of resistivity and sheet resistance.

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CMT-SR3000

Sheet Resistance & Resistivity Measuring System (Four Point Probe System for Glass).

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CMT-SR5000

Sheet Resistance & Resistivity Measuring System (Four Point Probe System for 12″ Wafer).

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Probe Heads:

Miniature Catridge Four Point Probe Head

PRECISION 4-POINT RESISTIVITY PROBE HEADS

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