This model provides a shielded, electrically quiet, atmosphere controlled environment for high sensitivity capacitance and current measurements at near liquid nitrogen temperatures, 77°K.
Cryogenic Station by MDC A multipurpose Cold Chuck Station
The MDC Cryogenic Probing System is the ideal companion to computerized C-V plotters to perform doping profile and capacitance-voltage measurements. The Cryogenic Probing System also facilitates a wide variety of other device measurements at low temperatures such as interface trap density determination or current-voltage tests.
MDC Cryogenic Probing Systems are available in a variety of standard and custom configurations with a choice of chuck sizes, and probe configurations.
Key Features:
For wafers up to 150 mm diameter. Minimum wafer diameter: 50 mm
Low stray capacitance, BNC feedthroughs
Microscope stage can move to see all of wafer
Transparent top cover.
Up to 5 probe capacity
Sample to be cooled to near liquid nitrogen temperature
Sample chamber able to be purged with dry nitrogen to prevent condensation
Sample chamber can be in darkness to allow for MOS inversion region stabilization.
Clean room compatible
Convenient slot to load wafers without removing top of chuck enclosure.
Probe micropositioners outside dewar for convenient access.
Seals for probe holders as they pass through dewar wall.
Heater in chuck to enable temperature variation over the range of 80K to 450K (+2K).
[441H Only], not included with 441 model.
Temperature controller for chuck. [441H Only], not included with 441 model
Connections to Chuck / Dewar:
BNC feedthroughs: Up to 5
Return for dry nitrogen (or vent to atmosphere)
Dry nitrogen inlet/outlet: 2 (Swagelok, 0.25”)
LN2 inlet/outlet: 2 (Swagelok, 0.25”)
Specifications:
Facility Requirements
Power: For microscope illumination only.
Coolant: Liquid nitrogen at low pressure.
Purging: Dry nitrogen. Maximum pressure of 2 PSI (0.15 Kg/cm2).
Vacuum: Process Vacuum, 5-15″ (100-400 mm) Hg.
Dimensions: Width 19” (49 cm); Depth 22” (56 cm); Height 12” (33 cm)
CSM/Win Systems from MDC are the ideal instruments to make the most of your cryogenic measurements. CSM/Win Systems include extensive software to perform a variety of tests on semiconductors and MOS devices.
MDC CSM/Win Systems are available with a wide selection of voltage ranges and capacitance, conductance, and current measurement capabilities. Systems performing single frequency, multiple frequency, and quasistatic measurements are available.
