Manufactured with 6-way connector probe head to be compatible with systems manufactured by CDE, Creative Design Engineering.
Cartridge probe with 6-way connector (CDE)
All Jandel probes are built to a high level of mechanical accuracy. Specifications for radii, spacing and planarity are verified by video inspection system and optical interferometer. Loads are verified by electronic force gauge. Each probe has upper and lower jeweled needle guides. The probe manufactured for KLA/Tencor/Prometrix tools is very similar, however the probes are not inter-changeable and great care should be taken, especially if both systems are in use on site. CDE compatible probe heads have a distinctive black nosepiece.
|
Probe spacing |
0.500mm, 0.635mm, 1.00mm, 1.27mm, 1.591mm (needle to needle) |
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Tolerance |
+/- 10 microns |
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Arrangement |
Linear or square array |
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Needles |
Tungsten carbide 0.4mm diameter (0.3mm diameter for close spacing) |
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Needle option |
50% Osmium alloy tips are available |
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Radii |
12.5, 25, 40, 100, 150, 200, 300, 500 microns |
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Retraction to pad |
0.5 mm |
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Planarity |
+/- 0.025mm or better |
|
Loads |
Fixed between 100g and 250g |
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Electrical leakage |
1013 ohms resistance between needles at 500 volts |
Note: CDE tools operate differently to other systems and the needles should never be retracted as far as the probe body. The optimum load is at 0.5mm retraction and the system should be carefully set up prior to the probe being used so that this is achieved. Alternatively the auto touch function can be used on some models.
