Probes for Prometrix KLA/Tencor

Manufactured with 6-way connector probe head to be compatible with systems manufactured by KLA/ Tencor (formerly Prometrix).

Cartridge probe with 6-way connector (KLA/Tencor)

All Jandel probes are built to a high level of mechanical accuracy. Specifications for radii, spacing and planarity are verified by video inspection system and optical interferometer. Loads are verified by electronic force gauge. Each probe has upper and lower jeweled needle guides. The probe manufactured for CDE tools is very similar, however the probes are not inter-changeable and great care should be taken, especially if both systems are in use on site. CDE compatible probe heads have a distinctive black nosepiece.

Probe spacing

0.500mm, 0.635mm, 1.00mm, 1.27mm, 1.591mm (needle to needle)


+/- 10 microns


Linear or square array


Tungsten carbide 0.4mm diameter (0.3mm diameter for close spacing)

Needle option

50% Osmium alloy tips are available


12.5, 25, 40, 100, 150, 200, 300, 500 microns

Retraction to pad

0.5 mm


+/- 0.025mm or better


Fixed between 10g and 250g

Electrical leakage

1013 ohms resistance between needles at 500 volts


If you require any further information on the Cartridge probe with 6- way connector please do not hesitate to contact us!