The probe is available in two sizes at the same cost. One size is for wafers up to 150mm diameter and the second for wafers up to 200mm diameter.
Multiposition Probe Stand
If small sized wafers are to be measured the smaller version is more suitable for placement of the wafers on the measurement table. The Θ movement clicks in four positions at 90 degrees and the linear movement in up to 10 positions giving repeat placement accuracy of +/- 1mm.
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Max. sample size |
150mm wafer (200mm wafer on request at no extra cost) |
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Max. sample thickness |
Samples up to 4mm thick can be measured |
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Microswitch |
Prevents current flow when probe is not in contact with the sample |
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Manual Control |
Simple lever operation for probe contact and removal |
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Simple set up |
Single wire connects the probe stand and measurement equipment |
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X-Θ Stage |
Repositioning accuracy of +/-1mm |
Available Probes
